半導體設備消耗性零件

駿佳科技有限公司
Junjia Tech Corp.

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產品介紹
	壓力系列:
	電漿設備:
	半導體設備零件:
		- Collimator
		- Heater
		- P/C Chuck
		- Retaining Ring
		- Shower Head
		- Susceptor
		- Metal Seal

	Pillar
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Metal Seal:

Metal Seal are used in a wide variety of applivations where normal seals can't handle extremes of temperature, pressure, medium or combinations there off.

Type of Metal O-Ring/C-Ring

Type		Applications
	OI OE	Metal O-Ring internal or external pressure face seal - Avoids ingress of thr working fluid into the seal - Moderate load - Moderate pressure capability
	OVI	Metal O-Ring internally vented and pressure-energized face seal - Moderate load - High pressure capability
	OVE	Metal O-Ring externally vented and pressure-energized face seal - Moderate load - High pressure capability
	OSI OSE	Metal O-Ring internal/external spring-energized face seal and axial seal - High load - Moderate pressure capability - Lowest leakrate
	OGI OGE	Metal O-Ring internal/external gas-energized face seal and axial seal - High load - Moderate pressure capability - Lowest leakrate
	CI	Metal C-Ring internal pressure face seall - Moderate load (lighter flanges & fewer bolts) - Good springback - High pressure capability
	CE	Metal C-Ring external pressure face seall - Moderate load - Good springback - High pressure capability
	CA	Metal C-Ring ,Axial seal - Close tolerance seal - For light installation loads
	CSI	Spring Energized Metal C-Ring, Internal pressure face seal - Lowest leakrate - High load - High pressure capability
	CSE	Spring Energized Metal C-Ring, Internal pressure face seal - Lowest leakrate - High load - High pressure capability
	CSA	Spring Energized Metal C-Ring, Axial seal - Capable of sealing higher reversing pressure than standard CA-seal